Appears that with Monterey 12.2 or some other recent upgrade, something changed with OneDrive’s local file storage. I had been excluding Users/$username/OneDrive from my backups but now need to include:

Users/$username/Library/CloudStorage/OneDrive-SharedLibraries-$name of share

OneDrive’s links seem to cause SuperDuper! to fail, so this path needs to be updated in any Exclude scripts on your backup. If your SuperDuper! backup is failing after upgrading, this could be the cause.